@misc{indiciaefe847f41b2a8, title = {Tracking the creation of single photon emitters in AlN by implantation and annealing}, author = {H. B. Yağcı and E. Nieto Hernández and J. K. Cannon and S. G. Bishop and E. Corte and J. P. Hadden and P. Olivero and J. Forneris and A. J. Bennett}, year = {2025}, doi = {10.1016/j.optmat.2024.115967}, url = {https://arxiv.org/abs/2501.12546}, note = {Source identifier: 2501.12546} }