@misc{indiciaec553ea296b2c,
  title = {Cavity-based compact light source for extreme ultraviolet lithography},
  author = {Changchao He and Hanxiang Yang and Nanshun Huang and Bo Liu and Haixiao Deng},
  year = {2025},
  url = {https://arxiv.org/abs/2501.14541},
  note = {Source identifier: 2501.14541}
}