TY - RPRT TI - Refining interface stress measurement in nanomultilayers through layer corrugation and interface roughness corrections AU - Yang Hu AU - Aleksandr Druzhinin AU - Claudia Cancellieri AU - Vladyslav Turlo PY - 2025 UR - https://arxiv.org/abs/2501.18247 ID - 2501.18247 ER -