TY - RPRT TI - Tuning the surface energy of fluorinated diamond-like carbon coatings via plasma immersion ion implantation plasma-enhanced chemical vapor deposition with 1,1,1,2-tetrafluoroethane AU - Yuhan Tong AU - Maryam Zahedian AU - Aiping Zeng AU - Ricardo Vidrio AU - Mike Efremov AU - Shenwei Yin AU - Hongyan Mei AU - Patrick Heaney AU - Jennifer T. Choy PY - 2025 UR - https://arxiv.org/abs/2502.00985 ID - 2502.00985 ER -