@misc{indiciaefa1f0ff09886, title = {Deep Learning-Optimized, Fabrication Error-Tolerant Photonic Crystal Nanobeam Cavities for Scalable On-Chip Diamond Quantum Systems}, author = {Sander van Haagen and Salahuddin Nur and Ryoichi Ishihara}, year = {2025}, url = {https://arxiv.org/abs/2502.03987}, note = {Source identifier: 2502.03987} }