@misc{indiciae92da17500aaa, title = {WaferLLM: Large Language Model Inference at Wafer Scale}, author = {Congjie He and Yeqi Huang and Pei Mu and Ziming Miao and Jilong Xue and Lingxiao Ma and Fan Yang and Luo Mai}, year = {2025}, url = {https://arxiv.org/abs/2502.04563}, note = {Source identifier: 2502.04563} }