@misc{indiciaeefe2db1346b7,
  title = {Effect of Annealing on Al Diffusion and its Impact on the Properties of Ga\$\_2\$O\$\_3\$ Thin Films Deposited on c-plane Sapphire by RF Sputtering},
  author = {Ana Sofia Sousa and Duarte M. Esteves and Tiago T. Robalo and Mário S. Rodrigues and Luís F. Santos and Katharina Lorenz and Marco Peres},
  year = {2025},
  doi = {10.1002/pssr.202500053},
  url = {https://arxiv.org/abs/2502.12823},
  note = {Source identifier: 2502.12823}
}