@misc{indiciaea0c163092aa7,
  title = {Characterization of ion track etched conical nanopores in thermal and PECVD SiO\$\_\{2\}\$ using small angle X-ray scattering},
  author = {Shankar Dutt and Rudradeep Chakraborty and Christian Notthoff and Pablo Mota-Santiago and Christina Trautmann and Patrick Kluth},
  year = {2025},
  url = {https://arxiv.org/abs/2502.14118},
  note = {Source identifier: 2502.14118}
}