@misc{indiciaebdefac91434c,
  title = {SEM-CLIP: Precise Few-Shot Learning for Nanoscale Defect Detection in Scanning Electron Microscope Image},
  author = {Qian Jin and Yuqi Jiang and Xudong Lu and Yumeng Liu and Yining Chen and Dawei Gao and Qi Sun and Cheng Zhuo},
  year = {2025},
  doi = {10.1145/3676536.3676752},
  url = {https://arxiv.org/abs/2502.14884},
  note = {Source identifier: 2502.14884}
}