@misc{indiciae59633acd1bd4,
  title = {Metal-organic chemical vapor deposition of MgSiN\$\_\{2\}\$ thin films},
  author = {Vijay Gopal Thirupakuzi Vangipuram and Chenxi Hu and Abdul Mukit Majumder and Christopher Chae and Kaitian Zhang and Jinwoo Hwang and Kathleen Kash and Hongping Zhao},
  year = {2025},
  url = {https://arxiv.org/abs/2502.17306},
  note = {Source identifier: 2502.17306}
}