@misc{indiciae902f60ce86db,
  title = {Effect of substrate temperature on the deposition of Al-doped ZnO thin films using high power impulse magnetron sputtering},
  author = {Martin Mickan and Ulf Helmersson and David Horwat},
  year = {2025},
  doi = {10.1016/j.surfcoat.2018.04.089},
  url = {https://arxiv.org/abs/2502.20836},
  note = {Source identifier: 2502.20836}
}