TY  - RPRT
TI  - Effect of substrate temperature on the deposition of Al-doped ZnO thin films using high power impulse magnetron sputtering
AU  - Martin Mickan
AU  - Ulf Helmersson
AU  - David Horwat
PY  - 2025
DO  - 10.1016/j.surfcoat.2018.04.089
UR  - https://arxiv.org/abs/2502.20836
ID  - 2502.20836
ER  -