@misc{indiciae916a03f5f4e1,
  title = {Local Rational Modeling for Identification Beyond the Nyquist Frequency: Applied to a Prototype Wafer Stage},
  author = {Max van Haren and Lennart Blanken and Koen Classens and Tom Oomen},
  year = {2025},
  doi = {10.1109/tcst.2025.3568550},
  url = {https://arxiv.org/abs/2503.01344},
  note = {Source identifier: 2503.01344}
}