TY  - RPRT
TI  - Local Rational Modeling for Identification Beyond the Nyquist Frequency: Applied to a Prototype Wafer Stage
AU  - Max van Haren
AU  - Lennart Blanken
AU  - Koen Classens
AU  - Tom Oomen
PY  - 2025
DO  - 10.1109/tcst.2025.3568550
UR  - https://arxiv.org/abs/2503.01344
ID  - 2503.01344
ER  -