@misc{indiciae9caca3ed0cb8,
  title = {Frequency domain identification for multivariable motion control systems: Applied to a prototype wafer stage},
  author = {M. van der Hulst and R. A. González and K. Classens and P. Tacx and N. Dirkx and J. van de Wijdeven and T. Oomen},
  year = {2025},
  url = {https://arxiv.org/abs/2503.02869},
  note = {Source identifier: 2503.02869}
}