@misc{indiciae4a5545925789,
  title = {Vibration Analysis and Mitigation in Semiconductor Motion Stages Using DMAIC Methodology- A Case Study},
  author = {Yin Li and Hua Chen and Fugee Tsung},
  year = {2025},
  url = {https://arxiv.org/abs/2503.04019},
  note = {Source identifier: 2503.04019}
}