@misc{indiciae121449e4a344,
  title = {Medusa 84 SiH -- A novel high Selectivity Electron Beam Resist for Diamond Quantum Technologies},
  author = {Oliver Roman Opaluch and Sebastian Westrich and Nimba Oshnik and Philipp Fuchs and Jan Fait and Sandra Wolff and Harry Biller and Mandy Sendel and Christoph Becher and Elke Neu},
  year = {2025},
  doi = {10.1557/s43579-025-00757-2},
  url = {https://arxiv.org/abs/2503.04845},
  note = {Source identifier: 2503.04845}
}