@misc{indiciaecf4eaa07e585,
  title = {Enhancing Thin-Film Wafer Inspection With A Multi-Sensor Array And Robot Constraint Maintenance},
  author = {Néstor Eduardo Sánchez-Arriaga and Ethan Canzini and Nathan John Espley-Plumb and Michael Farnsworth and Simon Pope and Adrian Leyland and Ashutosh Tiwari},
  year = {2025},
  url = {https://arxiv.org/abs/2503.05853},
  note = {Source identifier: 2503.05853}
}