@misc{indiciae985ba6dd5c9c,
  title = {Error Source Sensitivity Analysis in Model-Based Coherence Scanning Interferometry for Thin Film Metrology},
  author = {Lixuan Xu and Cheng Chen and Rong Su},
  year = {2025},
  url = {https://arxiv.org/abs/2503.06088},
  note = {Source identifier: 2503.06088}
}