TY - RPRT TI - The effect of boron incorporation on leakage and wake-up in ferroelectric Al_{1-x}Sc_xN AU - Maike Gremmel AU - Chandrashekhar Prakash Savant AU - Debaditya Bhattacharya AU - Georg Schönweger AU - Debdeep Jena AU - Simon Fichtner PY - 2025 UR - https://arxiv.org/abs/2503.08399 ID - 2503.08399 ER -