@misc{indiciaeee3c085d0b2c,
  title = {Highly Uniform Thermally Undercut Silicon Photonic Devices in a 300 mm CMOS Foundry Process},
  author = {Robert Parsons and Kaylx Jang and Yuyang Wang and Asher Novick and A. Matthew Smith and Christopher C. Tison and Yonas Gebregiorgis and Venkatesh Deenadayalan and Matthew van Niekerk and Lewis Carpenter and Tat Ngai and Gerald Leake and Daniel Coleman and Xiang Meng and Stefan Preble and Michael L. Fanto and Keren Bergman and Anthony Rizzo},
  year = {2025},
  url = {https://arxiv.org/abs/2503.09009},
  note = {Source identifier: 2503.09009}
}