@misc{indiciaea60df8e48cec,
  title = {Investigation of physical and electrical properties of a suboxide layer at Si/Si-hexafluoride interface},
  author = {Seref Kalem},
  year = {2025},
  doi = {10.1038/s41598-024-63377-1},
  url = {https://arxiv.org/abs/2503.12126},
  note = {Source identifier: 2503.12126}
}