TY  - RPRT
TI  - Investigation of physical and electrical properties of a suboxide layer at Si/Si-hexafluoride interface
AU  - Seref Kalem
PY  - 2025
DO  - 10.1038/s41598-024-63377-1
UR  - https://arxiv.org/abs/2503.12126
ID  - 2503.12126
ER  -