@misc{indiciae3346c8804e27, title = {Reversing Hydrogen-Related Loss in \$α\$-Ta Thin Films for Quantum Device Fabrication}, author = {D. P. Lozano and M. Mongillo and B. Raes and Y. Canvel and S. Massar and A. M. Vadiraj and Ts. Ivanov and R. Acharya and J. Van Damme and J. Van de Vondel and D. Wan and A. Potocnik and K. De Greve}, year = {2025}, doi = {10.1002/advs.202509244}, url = {https://arxiv.org/abs/2503.12889}, note = {Source identifier: 2503.12889} }