@misc{indiciae4f922ca4dc68, title = {Compensating Hysteresis and Mechanical Misalignment in Piezo-Stepper Actuators}, author = {Max van Meer and Tim van Meijel and Emile van Halsema and Edwin Verschueren and Gert Witvoet and Tom Oomen}, year = {2025}, url = {https://arxiv.org/abs/2503.13079}, note = {Source identifier: 2503.13079} }