@misc{indiciaef47337ca698b,
  title = {Low-loss Nb on Si superconducting resonators from a dual-use spintronics deposition chamber and with acid-free post-processing},
  author = {Maciej W. Olszewski and Jadrien T. Paustian and Tathagata Banerjee and Haoran Lu and Jorge L. Ramirez and Nhi Nguyen and Kiichi Okubo and Rohit Pant and Aleksandra B. Biedron and Daniel C. Ralph and Christopher J. K. Richardson and Gregory D. Fuchs and Corey Rae H. McRae and Ivan V. Pechenezhskiy and B. L. T. Plourde and Valla Fatemi},
  year = {2026},
  doi = {10.1063/5.0325435},
  url = {https://arxiv.org/abs/2503.13285},
  note = {Source identifier: 2503.13285}
}