@misc{indiciae4308358b70ae, title = {Sustainable wafer-scale integration of epitaxial ZnO on silicon for piezoelectric devices}, author = {D. Sanchez-Fuentes and R. Desgarceaux and A. Rahal and L. Garcia and S. Bousri and S. Ding and N. Camara and F. Pascal and R. Garcia-Bermejo and N. Guillaume and G. Ardila and J. Gazquez and C. Magen and S Plana-Ruiz and C. Guasch and A. Carretero-Genevrier}, year = {2025}, url = {https://arxiv.org/abs/2503.14069}, note = {Source identifier: 2503.14069} }