@misc{indiciaedf8e7eab669d, title = {Development of High-Quality \$α\$-Ta Film at Room Temperature via Seed Layer Engineering}, author = {Senthil Kumar Karuppannan and Naga Manikanta Kommanaboina and Hui Hui Kim and Nelson Lim Chee Beng and Yap Lee Koon Sherry and Yan Guangxu and Manas Mukherjee}, year = {2025}, url = {https://arxiv.org/abs/2503.16812}, note = {Source identifier: 2503.16812} }