@misc{indiciaeb136258c7fc8,
  title = {Fabrication Optimization of van der Waals Metasurfaces: Inverse Patterning Boosts Resonance Quality Factor},
  author = {Jonas Biechteler and Connor Heimig and Thomas Weber and Dmytro Gryb and Luca Sortino and Stefan A. Maier and Leonardo de S. Menezes and Andreas Tittl},
  year = {2025},
  url = {https://arxiv.org/abs/2503.17128},
  note = {Source identifier: 2503.17128}
}