@misc{indiciae9f19da29dcec, title = {Design of an aluminum nitride based electro-optic phase modulator and photonic switch for next generation scalable photonic integrated circuits}, author = {Suat Icli and Rangana Banerjee Chaudhuri and Elena Jordan and Fatemeh Salahshoori and Tanja E. Mehlstäubler}, year = {2025}, url = {https://arxiv.org/abs/2503.18861}, note = {Source identifier: 2503.18861} }