@misc{indiciae9e26db19c6c3, title = {A three-axis Nanopositioner based on Near-Field Acoustic Levitation and Electromagnetic Actuation}, author = {K. S. Vikrant and Prosanto Biswas and S. O. Reza Moheimani}, year = {2025}, doi = {10.1016/j.sna.2025.116894}, url = {https://arxiv.org/abs/2503.19175}, note = {Source identifier: 2503.19175} }