TY - RPRT TI - A three-axis Nanopositioner based on Near-Field Acoustic Levitation and Electromagnetic Actuation AU - K. S. Vikrant AU - Prosanto Biswas AU - S. O. Reza Moheimani PY - 2025 DO - 10.1016/j.sna.2025.116894 UR - https://arxiv.org/abs/2503.19175 ID - 2503.19175 ER -