@misc{indiciae31ea2918267f,
  title = {3D Heterogeneous Integration of Silicon Nitride and Aluminum Nitride on Sapphire toward Ultra-wideband Photonics Integrated Circuits},
  author = {Liang Zhang and Yanan Guo and Junxi Wang and Jinmin Li and Jianchang Yan},
  year = {2025},
  url = {https://arxiv.org/abs/2503.22544},
  note = {Source identifier: 2503.22544}
}