TY  - RPRT
TI  - 3D Heterogeneous Integration of Silicon Nitride and Aluminum Nitride on Sapphire toward Ultra-wideband Photonics Integrated Circuits
AU  - Liang Zhang
AU  - Yanan Guo
AU  - Junxi Wang
AU  - Jinmin Li
AU  - Jianchang Yan
PY  - 2025
UR  - https://arxiv.org/abs/2503.22544
ID  - 2503.22544
ER  -