@misc{indiciae368a6de608bf,
  title = {Parametric Operator Inference to Simulate the Purging Process in Semiconductor Manufacturing},
  author = {Seunghyon Kang and Hyeonghun Kim and Boris Kramer},
  year = {2026},
  url = {https://arxiv.org/abs/2504.03990},
  note = {Source identifier: 2504.03990}
}