TY  - RPRT
TI  - Parametric Operator Inference to Simulate the Purging Process in Semiconductor Manufacturing
AU  - Seunghyon Kang
AU  - Hyeonghun Kim
AU  - Boris Kramer
PY  - 2026
UR  - https://arxiv.org/abs/2504.03990
ID  - 2504.03990
ER  -