@misc{indiciae079ea297051f, title = {Masked Autoencoder Self Pre-Training for Defect Detection in Microelectronics}, author = {Nikolai Röhrich and Alwin Hoffmann and Richard Nordsieck and Emilio Zarbali and Alireza Javanmardi}, year = {2025}, url = {https://arxiv.org/abs/2504.10021}, note = {Source identifier: 2504.10021} }