TY  - RPRT
TI  - Masked Autoencoder Self Pre-Training for Defect Detection in Microelectronics
AU  - Nikolai Röhrich
AU  - Alwin Hoffmann
AU  - Richard Nordsieck
AU  - Emilio Zarbali
AU  - Alireza Javanmardi
PY  - 2025
UR  - https://arxiv.org/abs/2504.10021
ID  - 2504.10021
ER  -