@misc{indiciae97064b1a798b,
  title = {CMOS-compatible vanadium dioxide via Pulsed Laser and Atomic Layer deposition: towards ultra-thin film phase-change layers},
  author = {Anna Varini and Cyrille Masserey and Vanessa Conti and Zahra Saadat Somaehsofla and Ehsan Ansari and Igor Stolichnov and Adrian M. Ionescu},
  year = {2025},
  url = {https://arxiv.org/abs/2504.10056},
  note = {Source identifier: 2504.10056}
}