@misc{indiciae469ee7312b8c,
  title = {Coherent EUV scatterometry of 2D periodic structure profiles with mathematically optimal experimental design},
  author = {Clay Klein and Nicholas W. Jenkins and Yunzhe Shao and Yunhao Li and Seungbeom Park and Wookrae Kim and Henry C. Kapteyn and Margaret M. Murnane},
  year = {2025},
  url = {https://arxiv.org/abs/2504.12133},
  note = {Source identifier: 2504.12133}
}