TY  - RPRT
TI  - Coherent EUV scatterometry of 2D periodic structure profiles with mathematically optimal experimental design
AU  - Clay Klein
AU  - Nicholas W. Jenkins
AU  - Yunzhe Shao
AU  - Yunhao Li
AU  - Seungbeom Park
AU  - Wookrae Kim
AU  - Henry C. Kapteyn
AU  - Margaret M. Murnane
PY  - 2025
UR  - https://arxiv.org/abs/2504.12133
ID  - 2504.12133
ER  -