@misc{indiciae7e86e45af308, title = {Demonstration of highly scaled AlScN ferroelectric diode memory with storage density > 100 Mbit/mm\$\textasciicircum{}2\$}, author = {Zekun Hu and Hyunmin Cho and Rajeev Kumar Rai and Kefei Bao and Yinuo Zhang and Zhaosen Qu and Yunfei He and Yaoyang Ji and Chloe Leblanc and Kwan-Ho Kim and Zirun Han and Zhen Qiu and Xingyu Du and Eric A. Stach and Roy Olsson and Deep Jariwala}, year = {2025}, url = {https://arxiv.org/abs/2504.13283}, note = {Source identifier: 2504.13283} }