@misc{indiciae0c1afa2b0797, title = {Scalable High-Precision Microfabrication on Various Lithography-Incompatible Substrates and Materials Enabled by Wafer-Scale Transfer Lithography of Commercial Photoresists}, author = {Qinhua Guo and Zhiqing Xu and Lizhou Yang and Jingyang Zhang and Yawen Gan and Jiajun Zhang and Jiahao Jiang and Yunda Wang}, year = {2026}, url = {https://arxiv.org/abs/2504.15078}, note = {Source identifier: 2504.15078} }