TY  - RPRT
TI  - Scalable High-Precision Microfabrication on Various Lithography-Incompatible Substrates and Materials Enabled by Wafer-Scale Transfer Lithography of Commercial Photoresists
AU  - Qinhua Guo
AU  - Zhiqing Xu
AU  - Lizhou Yang
AU  - Jingyang Zhang
AU  - Yawen Gan
AU  - Jiajun Zhang
AU  - Jiahao Jiang
AU  - Yunda Wang
PY  - 2026
UR  - https://arxiv.org/abs/2504.15078
ID  - 2504.15078
ER  -