@misc{indiciae6037e9ee4661, title = {Positive-tone Nanolithography of Antimony Trisulfide with Femtosecond Laser Wet-etching}, author = {Abhrodeep Dey and Uwe Hübner and Albane Benardais and Xiaofei Wu and Andrea Dellith and Jan Dellith and Torsten Wieduwilt and Henrik Schneidewind and Markus A Schmidt and Virginie Nazabal and Volker Deckert and Jer-Shing Huang and Wei Wang}, year = {2025}, url = {https://arxiv.org/abs/2504.15858}, note = {Source identifier: 2504.15858} }