@misc{indiciae3e66817abaa3,
  title = {CMOS-compatible processing and room-temperature characterization on wafer-level for scalable quantum computing},
  author = {S. J. K. Lang and T. Mayer and J. Weber and C. Dhieb and I. Eisele and W. Lerch and Z. Luo and C. Moran Guizan and E. Music and L. Sturm-Rogon and D. Zahn and R. N. Pereira and C. Kutter},
  year = {2025},
  url = {https://arxiv.org/abs/2504.18173},
  note = {Source identifier: 2504.18173}
}