@misc{indiciae966642d86075,
  title = {Leakage Suppression Across Temperature in Al1-xScxN Thin Film Ferroelectric Capacitors through Boron Incorporation},
  author = {Pedram Yousefian and Xiaolei Tong and Jonathan Tan and Dhiren K. Pradhan and Deep Jariwala and Roy H. Olsson III},
  year = {2025},
  doi = {10.1109/led.2025.3587950},
  url = {https://arxiv.org/abs/2505.01612},
  note = {Source identifier: 2505.01612}
}