TY  - RPRT
TI  - Leakage Suppression Across Temperature in Al1-xScxN Thin Film Ferroelectric Capacitors through Boron Incorporation
AU  - Pedram Yousefian
AU  - Xiaolei Tong
AU  - Jonathan Tan
AU  - Dhiren K. Pradhan
AU  - Deep Jariwala
AU  - Roy H. Olsson III
PY  - 2025
DO  - 10.1109/led.2025.3587950
UR  - https://arxiv.org/abs/2505.01612
ID  - 2505.01612
ER  -