@misc{indiciae4a40a5f410b8, title = {Enhancing Contrast and Resolution for Electron-beam Lithography on Insulating Substrates}, author = {Deepak Kumar and Cooper Meyers and RJ Smith and J. Todd Hastings}, year = {2025}, url = {https://arxiv.org/abs/2505.03122}, note = {Source identifier: 2505.03122} }