TY  - RPRT
TI  - Enhancing Contrast and Resolution for Electron-beam Lithography on Insulating Substrates
AU  - Deepak Kumar
AU  - Cooper Meyers
AU  - RJ Smith
AU  - J. Todd Hastings
PY  - 2025
UR  - https://arxiv.org/abs/2505.03122
ID  - 2505.03122
ER  -